New Method for Making Thin Films with Custom Thickness
Author Information
Author(s): Hsieh Chi-Yung, Lin Yu-Chi, Huang Xuan-Shan, Lin Jing-Ting, Huang Cheng-Sheng
Primary Institution: National Yang Ming Chiao Tung University
Hypothesis
Can a novel deposition technique create thin films with customizable thickness profiles suitable for mass production?
Conclusion
The study successfully developed a method for depositing thin films with linear and sinusoidal thickness profiles, demonstrating its potential for mass production.
Supporting Evidence
- The method allows for the fabrication of films with linear thickness gradients of 49.3 and 86.8 Å/mm.
- A linear variable filter was designed based on the fabricated films, demonstrating practical applications.
- The technique enables batch production without additional complex machinery.
Takeaway
This study found a new way to make thin films that can be thick in some places and thin in others, which is useful for making special optical devices.
Methodology
The method involved using a fixed shadow mask and a rotating carrier plate to deposit films with specific thickness profiles in a single step.
Limitations
The method's effectiveness may be influenced by the uneven distribution of target molecules in the deposition chamber.
Digital Object Identifier (DOI)
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