Range Expansion Technology for Ring MEMS Gyroscopes Based on Drive Voltage Modulation
2024

Controlling Sensitivity in MEMS Gyroscopes with Drive Voltage

publication Evidence: moderate

Author Information

Author(s): Cui Ke, Liu Li, An Daren, Wang Xinyu, An Qi, Lei Zengyu, Kou Zhiwei, Cao Huiliang

Primary Institution: North University of China

Hypothesis

Can adjusting the driving control voltage of a ring MEMS gyroscope improve its sensitivity and range?

Conclusion

Lower driving voltages significantly increase the range of the gyroscope while maintaining performance.

Supporting Evidence

  • Lower driving voltages increase the gyroscope’s range to ±1000°/s.
  • At 10.85 V, the gyroscope achieves a range of ±200°/s with a minimum resolution of 0.019°/s.
  • The study established a mathematical model correlating driving control voltage with sensitivity.
  • Performance testing showed that the gyroscope maintains high resolution at low angular velocities.

Takeaway

This study shows that by changing the voltage used to power a tiny sensor, we can make it measure faster and more accurately.

Methodology

The study involved applying different driving voltages to the same gyroscope and evaluating its performance and range.

Limitations

The performance of the gyroscope degrades at higher ranges due to increased noise and reduced sensitivity.

Digital Object Identifier (DOI)

10.3390/mi15121419

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