Controlling Optical Properties of Nb2O5 Film with Heat
Author Information
Author(s): Liang Xianpeng, Liu Bowen, Yuan Quan, Lin Xiaomin, Ren Shaopeng, Zhao Shuaifeng, Yin Xiaojun, Fei Shuguo
Primary Institution: Shenyang Academy of Instrumentation Science, Shenyang 110043, China
Hypothesis
The thermal stability and optical properties of Nb2O5 thin films can be optimized through controlled thermal treatment.
Conclusion
The study found that Nb2O5 thin films maintain their amorphous structure up to 400 °C, and their optical properties can be finely controlled within a 1.6% wavelength range.
Supporting Evidence
- The amorphous stability of Nb2O5 thin films can be maintained up to 400 °C.
- The refractive index decreases with increasing annealing temperature.
- The hardness of the films increases with rising thermal treatment temperatures.
Takeaway
This study shows that heating Nb2O5 films can change how they look and work, but we should not heat them too much or they might not work well.
Methodology
Nb2O5 films were prepared using magnetron sputtering and subjected to thermal treatment at various temperatures to analyze changes in their properties.
Limitations
The study primarily focused on the effects of thermal treatment without exploring other potential factors affecting film properties.
Digital Object Identifier (DOI)
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