Guide to Designing and Testing MEMS Resonant Devices
Author Information
Author(s): Viola Carolina, Pavesi Davide, Weng Lichen, Gobat Giorgio, Maspero Federico, Zega Valentina
Primary Institution: Politecnico di Milano
Hypothesis
Can a simplified modeling procedure effectively predict the nonlinear dynamics of MEMS resonant devices?
Conclusion
The proposed modeling procedure accurately predicts the behavior of MEMS resonant devices, demonstrating its effectiveness for practical applications.
Supporting Evidence
- The modeling procedure was validated through the fabrication and testing of a cantilever beam resonator.
- The study demonstrated a satisfactory agreement between numerical predictions and experimental data.
- The proposed design tool is user-friendly and versatile for MEMS designers.
Takeaway
This study shows how to design and test tiny machines that can vibrate, helping them work better and be made cheaper.
Methodology
The study involved creating and testing a cantilever beam resonator and a ring resonator using a simplified modeling procedure in COMSOL Multiphysics.
Potential Biases
Potential biases may arise from fabrication imperfections and assumptions in the modeling process.
Limitations
The model assumes uniform over-etch and does not account for pre-deflection due to fabrication stresses.
Digital Object Identifier (DOI)
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