Electrode Elastic Modulus and Its Impact on Ferroelectric Hafnium Zirconium Oxide
Author Information
Author(s): Lenox Megan K., Islam Md Rafiqul, Hoque Md Shafkat Bin, Skidmore Chloe H., Salanova Alejandro, Fields Shelby S., Jaszewski Samantha T., Maria Jon-Paul, Hopkins Patrick E., Ihlefeld Jon F.
Primary Institution: University of Virginia
Hypothesis
The study investigates the role of electrode elastic modulus in the capping effect of ferroelectric hafnium zirconium oxide thin films.
Conclusion
Higher electrode elastic modulus enhances the stability and polarization of ferroelectric hafnium zirconium oxide thin films.
Supporting Evidence
- Electrode elastic modulus directly correlates with the stress within the HZO layer and its remanent polarization.
- Devices with higher modulus electrodes show increased remanent polarization.
- Lower correlation exists between electrode CTE and HZO polarization, indicating CTE is not the dominant factor.
Takeaway
This study shows that the strength of the material used for the top layer of a ferroelectric device affects how well it works, especially in keeping the ferroelectric properties stable.
Methodology
The study involved fabricating devices with different electrode materials and measuring their effects on the ferroelectric properties of hafnium zirconium oxide using X-ray diffraction and polarization measurements.
Limitations
The study may not account for all variables affecting ferroelectric performance, such as the influence of other material properties.
Digital Object Identifier (DOI)
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