Fully Integrated MEMS Micropump and Miniaturized Mass Flow Sensor as Basic Components for a Microdosing System
2024

Integrated Micropump and Mass Flow Sensor for Microdosing Systems

publication Evidence: moderate

Author Information

Author(s): Martin Seidl, Gabriele Schrag

Primary Institution: Technical University of Munich

Hypothesis

The study aims to develop a miniaturized micropump and mass flow sensor that can be integrated into mobile microfluidic systems.

Conclusion

The developed micropump can achieve flow rates of up to 110 μL/min, while the mass flow sensor can detect flows as low as 10 μL/min.

Supporting Evidence

  • The micropump prototypes can pump gaseous media at flow rates of up to 110 μL/min.
  • The mass flow sensor can detect fluid flows as low as 10 μL/min.
  • Both devices are designed to be compatible for integration into mobile applications.

Takeaway

Researchers created a tiny pump and sensor that can work together to move and measure liquids, which could help in making small devices for delivering medicine.

Methodology

The study involved designing and fabricating a micropump and mass flow sensor using standard MEMS technology, followed by testing their performance in a controlled setup.

Limitations

The micropump's performance is limited by electrical insulation issues at voltages above 50 V, which need to be addressed in future designs.

Digital Object Identifier (DOI)

10.3390/mi15121404

Want to read the original?

Access the complete publication on the publisher's website

View Original Publication