Electrostatic MEMS Scanning Micromirrors with Piezoresistive Sensors
Author Information
Author(s): Shan Yameng, Qian Lei, He Kaixuan, Chen Bo, Wang Kewei, Li Wenchao, Shen Wenjiang
Primary Institution: School of Nano-Tech and Nano-Bionics, University of Science and Technology of China
Hypothesis
Can integrating piezoresistive sensors into electrostatic MEMS micromirrors improve their performance?
Conclusion
The study demonstrated that the integrated piezoresistive sensors significantly enhance the performance of electrostatic MEMS micromirrors, achieving improved sensitivity and stability.
Supporting Evidence
- The micromirror achieved optical scanning angles of 55° and 45° for the fast and slow axes, respectively.
- The sensitivity of the piezoresistive sensor was optimized to 13.87 mV/V/°.
- The performance of the micromirror in a vacuum environment was significantly better than in air, with a 3.3 times increase in scanning angle.
Takeaway
This study shows that adding special sensors to tiny mirrors helps them move better and more accurately, which is important for things like laser displays.
Methodology
The study involved designing and fabricating a 2D MEMS micromirror with integrated piezoresistive sensors, followed by testing its performance in a vacuum environment.
Limitations
The study primarily focused on the performance in vacuum conditions, which may not fully represent real-world applications.
Digital Object Identifier (DOI)
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