Laterally Excited Resonators Based on Single-Crystalline LiTaO3 Thin Film for High-Frequency Applications
2024
High-Frequency Applications of LiTaO3 Thin Film Resonators
publication
Evidence: high
Author Information
Author(s): Guan Chongrui, He Xingli
Primary Institution: Soochow University, Suzhou, China
Hypothesis
Can single-crystalline LiTaO3 thin films be effectively used in high-frequency acoustic resonators?
Conclusion
The study demonstrates that LiTaO3 thin film-based resonators can achieve high performance in high-frequency applications.
Supporting Evidence
- The fabricated devices exhibited a primary resonance around 4.1 GHz with a high-quality factor.
- The temperature coefficient of frequency for the primary resonant mode was calculated to be approximately -38 ppm/K.
- A ladder-type narrow band filter employing five XBARs was developed and characterized.
Takeaway
This research shows that special thin films can make tiny devices that help send signals really fast, which is important for things like cell phones.
Methodology
The study involved modeling, fabricating, and characterizing resonators using finite element analysis and experimental validation.
Limitations
The study does not address all potential loss factors in the simulations.
Digital Object Identifier (DOI)
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