High-efficiency Fresnel zone plates for hard X-rays by 100 keV e-beam lithography and electroplating
2011

High-efficiency Fresnel zone plates for hard X-rays

publication Evidence: moderate

Author Information

Author(s): Sergey Gorelick, Joan Vila-Comamala, Vitaliy A. Guzenko, Ray Barrett, Murielle Salomé, Christian David

Primary Institution: Paul Scherrer Institut

Hypothesis

Can high-aspect-ratio Fresnel zone plates (FZPs) be efficiently fabricated for hard X-ray applications?

Conclusion

The study successfully developed a reliable method for fabricating high-quality FZPs with diffraction efficiencies of 60-80% of theoretical values.

Supporting Evidence

  • FZPs were fabricated with outermost zone widths down to 50 nm and diameters up to 600 µm.
  • Diffraction efficiencies were measured for a wide range of X-ray energies (2.8–13.2 keV).
  • The measured efficiencies were 60-80% of the theoretical maximum values.

Takeaway

The researchers made special lenses that help us see tiny things using X-rays, and they found a way to make them work really well.

Methodology

The FZPs were fabricated using 100 keV electron-beam lithography and electroplating, followed by measuring their diffraction efficiencies over a range of X-ray energies.

Limitations

The main limitation is the reduced density of electroplated Au compared to bulk Au, which affects the diffraction efficiency.

Digital Object Identifier (DOI)

10.1107/S0909049511002366

Want to read the original?

Access the complete publication on the publisher's website

View Original Publication