Synthesis and Characterization of Optically Transparent and Electrically Conductive Mo-Doped ZnO, F-Doped ZnO, and Mo/F-Codoped ZnO Thin Films via Aerosol-Assisted Chemical Vapor Deposition
2024

Synthesis of Transparent and Conductive Mo and F Doped ZnO Thin Films

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Author Information

Author(s): Chen Nan, Ramzan Iqra, Li Shuhui, Carmalt Claire J.

Primary Institution: University College London

Hypothesis

Can doping ZnO with Mo and F improve its optical and electrical properties for optoelectronic applications?

Conclusion

Doping ZnO with Mo and F significantly enhances its conductivity and optical transparency, making it suitable for optoelectronic applications.

Supporting Evidence

  • The doped films showed improved optical transmittance of 75-85%.
  • The minimum resistivity achieved was 5.084 × 10–3 Ω·cm.
  • Carrier concentration increased to 5.483 × 10^19 cm–3 with improved mobility of 21.78 cm2 V–1 s–1.

Takeaway

Scientists made special films from zinc oxide that can let light through and conduct electricity better by adding tiny amounts of molybdenum and fluorine.

Methodology

The films were synthesized using aerosol-assisted chemical vapor deposition (AACVD) with zinc acetate dihydrate, molybdenum hexacarbonyl, and ammonium fluoride as precursors.

Limitations

The study did not explore the long-term stability of the doped films under various environmental conditions.

Digital Object Identifier (DOI)

10.1021/acs.cgd.4c01238

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